Kazhinji inoshandiswa mukutsvaga kana kwesainzi yekutsvaga, imba yakachena inzvimbo yakadzorwa ine mwero wakaderera wesvibisa seguruva, hutachiona hwemhepo, erosol zvimedu, uye makomputa emakemikari. Kuti uve chaiye, kamuri yakachena ine huwandu hwakadzorwa hwekusvibiswa izvo zvinotsanangurwa nehuwandu hwezvikamu zve cubic meter pane yakatarwa size. Mhepo yeAmbion panze munzvimbo yakajairika yeCity ine zviuru makumi matatu nematanhatu mu cubic metres,
Kuchenesa kamuri kuongorora
Makamuri akachena anoshandiswa mune imwe chete indasitiri imwe neimwe ingaita zvidiki zvidiki zvinokanganisa maitiro ekugadzira. Ivo vanosiyana muhukuru uye kuoma, uye vanoshandiswa zvakanyanya mumaindasitiri akadai saSemiconductor Kugadzira, mishonga, yekuita basa rekugadzira zvakajairika, Optics, mauto uye dhipatimendi reimba.
Kamuri yakachena chero yakapihwa nzvimbo ine zvigadzirwa zvinogadzirwa kuti uderedze kusvibiswa uye kudzora mamwe mimwe makatipiridzi senge tembiricha, humidy uye kumanikidzwa. Chikamu chakakosha ndechekushamwaridzana kwakakura kwekushanda kwemhepo (Hepa) faira iyo inoshandiswa kutengesa zvidimbu izvo zviri 0.3 micron uye yakakura muhukuru. Yese mweya yakapihwa mukamuri yakachena inopfuura neHipa mafirita, uye mune zvimwe zviitiko uko kuchena kwekunyora kwekuita kwakakosha, Ultra yakaderera mhepo (ULPA) mafirita anoshandiswa.
Vashandi vakasarudzwa kuti vashande mumakamuri akachena pasi pekudzidziswa kwakakura mukusvibisa kudzora pfungwa. Ivo vanopinda uye vanobuda mukamuri rakachena kuburikidza ne airlocks, mhepo yemhepo yemhepo uye / kana makamuri okutanga, uye anofanirwa kupfeka zvipfeko zvakasarudzika zvakagadzirirwa kubata zvisikwa zvinogadzirwa neganda nemuviri.
Zvichienderana neyakagadziriswa kamuri kana basa, vanhu vanoganhurirwa vanogona kunge vakamanikidzwa seyebhutsu matsvuku, kana yakawedzera yakafukidzwa zvakazara miviri yakavezwa bunny
Cheneswa kamuri chipfeko chinoshandiswa kudzivirira zvinhu kubva pakuburitswa kubva mumuviri wemupurani uye kusvibisa nharaunda. Iyo yakachena kamuri zvipfeko pachayo haifanire kusunungura zvidimbu kana mafaira kudzivirira kusvibiswa kwenzvimbo nevashandi. Rudzi urwu rwekusvibiswa kwevashandi runogona kushatisa chigadzirwa zvinogona kuita musicemiconductor uye maindasitiri emishonga uye zvinogona kukonzera kutapukirwa pakati pevashandi vekurapa nevarwere muindasitiri yehutano semuenzaniso.
Makamuri akachena makamuri anosanganisira bhutsu, shangu, ndebvu dzinovharira, madonhwe, majasi, marara, maHoods, maHoods, sleevers uye shangu uye shangu dzinovhara. Iyo mhando yehembe dzakachena dzemakamuri rinoshandiswa rinofanira kuratidza mukamuri rakachena uye zvigadzirwa zvedzidzo. Makamuri akadzika-akachena anogona kungoda shangu dzakasarudzika kuve zvizere zviga zvisina kunyorovera muguruva kana tsvina. Nekudaro, shangu bottoms haifanirwe kuumba kutsvedza njodzi nekuti kuchengetedzwa nguva dzose kunotangira. Sutu yakachena yemakamuri inowanzodikanwa yekupinda mukamuri yakachena. Makirasi zviuru gumi zvemakamuri akachena anogona kushandisa zvakapfava, musoro unovhara, uye bofu. Kune kirasi gumi makamuri akachena, kunyatsochenjera kupfeka maitiro neakavharwa nekheni zvese, bhutsu, magurovhosi uye yakazara prespurator yekuvhara inodiwa.
Kuchenesa kamuri mhepo inoyerera nheyo
Makamuri akachena anochengetedza mweya wekusununguka-wakasununguka kuburikidza nekushandiswa kweiyo hepa kana ulpa mafirita anoshandisa laminar kana mhirizhonga yemhepo inoyerera nheyo. Laminar, kana kusavimbika, mhepo inoyerera masisitimu yakadzika mhepo yakadzika pasi mumugwagwa unogara uchienderera. Laminar Mhepo Inoyerera Systems inowanzo shandiswa kune 100% yedenga kuti irambe ichingoda kuyerera. Laminar kuyerera maitiro anowanzo kutaurwa mune inotakurirwa mabasa ebasa (LF hoods), uye inobhadharwa muI iso-1 kuburikidza ne iso-4 makamuri akachena akachena.
Yakakodzera kamuri yekuchenesa mimba inokomberedza iyo yese mhepo yekugovera system, kusanganisira gadziriro dzekuparadza, kudzora mweya unodzoka. Mumakamuri ekuyerera anoyerera, izvi zvinoreva kushandiswa kwemhepo yekudzikira mhepo inodzoka yakatenderedza perimeter yenzvimbo. Mukutaurwa kwakadzika kwekuyerera, zvinoda kushandiswa kwemhepo kunodzokera kunzvimbo yekudonha kweiyo maitiro. Iko kushandiswa kweSiling yakamiswa mhepo inodzoka ndeyekupokana kune yakakodzera nzvimbo yekuchenesa mukamuri dhizaini.
Kuchenesa kamuri yekukwenenzverwa
Makamuri akachena anokweretwa nekuchenesa mweya. Mune federal standard 209 (a kusvika d) yeUSA, iyo nhamba yezvikamu zvakaenzana ne1.5μm yakayerwa mutsoka imwe yemhepo, uye kuverenga uku kunoshandiswa kuparadzanisa imba yakachena. Iyi metric noMenclature inogamuchirwa zvakare mune yazvino 209E vhezheni yeiyo standard. Federal Standard 209e inoshandiswa kudzikama. Iyo Nyowani Nyowani ndeye TC 209 kubva kuInternational Nharaunda Sangano. Mamiriro ese ari maviri anokwereta mukamuri rakachena nehuwandu hwezvikamu zvinowanikwa mumhepo yemarabhoritari. Iyo yakachena yemakamuri yekubatanidza madhiri FS 209E uye ISO 14644-1 inoda chaizvo zvimedu kuverenga zviyero uye kuverenga kuverenga kweiyo nzvimbo yekuchenesa yekamuri yakachena kana yakachena nzvimbo. MuUK, Britain Standard 5295 inoshandiswa kudzikisira makamuri akachena. Ichi chiyero chiri kuda kuve chakasarudzika neBS en iso 14644-1.
Makamuri akachena anoiswa zvichienderana nenhamba uye saizi yezvikamu zvinotenderwa nehoriyamu yemhepo. Nhamba dzakakura dzakaita se "kirasi 100" kana "kirasi 1000" Tarisao Iyo yakajairwa inobvumidzawo kutenderwa, saka zvinokwanisika kutsanangura ex "kirasi 2000."
Nhamba diki dzinoreva ISO 14644-1 zviyero, izvo zvinotsanangura iyo decimal logarithm yehuwandu hwezvikamu zvevhu 0.1 Saka, semuenzaniso, kirasi yechipiri 5 yakachena kamuri ine yakawanda 105 = 100,000 zvidimbu pane m³.
Ose ese fs 209e uye iso 14644-1 fani hukama hukama pakati pehukuru hwehukama uye timende kusimuka. Nechikonzero ichochi, hapana chakadai se zero zero svedzero. Yakajairwa kamuri mhepo inenge kirasi chiuru chimwe chete chiuru chimwe kana iso 9.
Iso 14644-1 yakachena yemakamuri miganhu
| Kirasi | Maximum zvimiti / m3 | Fed STD 209eequivalent | |||||
| > = 0.1 μm | > = 0.2 μm | > = 0.3 μm | > = 0.5 μm | > = 1 μM | > = 5 μM | ||
| ISO 1 | 10 | 2 | |||||
| Iso 2 | 100 | 24 | 10 | 4 | |||
| ISO 3 | Chiuru chimwe | 237 | 102 | 35 | 8 | Kirasi 1 | |
| ISO 4 | Zviuru gumi | 2,370 | 1,020 | 352 | 83 | Kirasi 10 | |
| Iso 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 | Kirasi zana |
| Iso 6 | Chiuru chimwe | 217,000 | 102,000 | 35,200 | 8,30 | 293 | Kirasi chiuru |
| ISO 7 | 352,000 | 83,200 | 2,930 | Kirasi zviuru gumi | |||
| Iso 8 | 3,520,000 | 832,000 | 29,300 | Kirasi 100,000 | |||
| Iso 9 | 35,200,000 | 8,320,000 | 293,000 | Mhepo yemhepo | |||
Kutumira Nguva: Mar-29-2023