Kuchengetedzwa kwezvakatipoteredza kunobhadharwa zvakanyanya uye zvakanyanya kutariswa, kunyanya nekuwedzera kwemamiriro ekunze emhute. Yakachena kamuri engineering ndeimwe yematanho ekudzivirira kwezvakatipoteredza. Maitiro ekushandisa yakachena imba engineering kuita basa rakanaka mukuchengetedza kwezvakatipoteredza? Ngatitaure nezve kutonga mune yakachena kamuri engineering.
Tembiricha uye humidity control muimba yakachena
Tembiricha uye hunyoro hwenzvimbo dzakachena zvinonyanya kutariswa zvichibva pane zvinodiwa pakuita, asi kana uchisangana nezvinodiwa, kunyaradza kwevanhu kunofanirwa kuverengerwa. Nekuvandudzwa kwezvinodiwa zvehutsanana hwemhepo, pane maitiro ekuomarara zvinodiwa zvekushisa uye humidity mukuita.
Semusimboti wakajairwa, nekuda kwekuwedzera kurongeka kwekugadzirisa, izvo zvinodikanwa zvetembiricha yekuchinja siyana zviri kuita zvidiki uye zvidiki. Semuyenzaniso, mune lithography uye exposure process yeyakakura-yakasanganiswa yedunhu kugadzirwa, mutsauko mukupisa kwekuwedzera coefficient pakati pegirazi nesilicon wafers anoshandiswa semasiki zvinhu ari kuramba achiwedzera kudiki.
Siricon wafer ine dhayamita ye 100 μ m inokonzera kuwedzera kwemutsara we 0.24 μ m kana tembiricha yakwira ne1 degree. Naizvozvo, tembiricha isingaperi ye ± 0.1 ℃ inodiwa, uye kukosha kwehunyoro kunowanzo kuderera nekuti mushure mekudikitira, chigadzirwa chinosvibiswa, kunyanya mumasemiconductor workshop anotya sodium. Iyi mhando yemusangano haifanirwe kudarika 25 ℃.
Kunyanya kunyorova kunokonzera mamwe matambudziko. Kana hunyoro hunopfuura 55%, condensation inoumbwa pamadziro epombi yemvura inotonhorera. Kana zvikaitika mumidziyo chaiyo kana maseketi, zvinogona kukonzera tsaona dzakasiyana. Kana hunyoro huri 50%, zviri nyore kuita ngura. Pamusoro pezvo, kana hunyoro hwakanyanyisa, guruva rinonamira pamusoro pesilicon wafer richave rakashongedzwa nemakemikari pamusoro pemvura kuburikidza nemamorekuru emvura ari mumhepo, izvo zvakaoma kubvisa.
Iyo yakakwirira yehunyoro hunyoro, zvakanyanya kuoma kubvisa kunamatira. Nekudaro, kana hunyoro hwehukama huri pasi pe30%, zvimedu zvakare nyore adsorbed pamusoro pepamusoro nekuda kwekuita kwesimba remagetsi emagetsi, uye nhamba huru yemidziyo yesemiconductor inowanzoputsika. Iyo yakakwana tembiricha yemhando yesilicon wafer kugadzirwa ndeye 35-45%.
Air pressurecontrolmuimba yakachena
Kune nzvimbo dzakawanda dzakachena, kuitira kudzivirira kusvibiswa kwekunze kubva pakupinda, zvakakosha kuchengetedza mukati memukati (static pressure) yakakwirira kudarika kunze kwekunze (static pressure). Kuchengetedzwa kwemusiyano wekumanikidza kunowanzo kuenderana neanotevera misimboti:
1. Dzvinyiriro munzvimbo dzakachena dzinofanira kunge dzakakwirira kudarika dziri munzvimbo dzisina kuchena.
2. Kudzvinyirirwa munzvimbo dzine hutsanana hwepamusoro kunofanira kunge kwakakwirira kudarika munzvimbo dziri pedyo dzine hutsanana hushoma.
3. Magonhi ari pakati pemakamuri akachena anofanira kuvhurwa akananga kumakamuri ane hutsanana hwepamusoro.
Kugadziriswa kwekudzvanyirira mutsauko kunoenderana nehuwandu hwemhepo nyowani, iyo inofanirwa kukwanisa kubhadharira kudonha kwemhepo kubva pagomba pasi peiyi mutsauko wekumanikidza. Saka chirevo chemuviri chekumanikidza musiyano ndiko kuramba kwekudonha (kana kupinza) kuyerera kwemhepo kuburikidza nepakasiyana-siyana mukamuri yakachena.
Nguva yekutumira: Jul-21-2023