Chirongwa cheCleanroom chinoreva kuburitswa kwezvinosvibisa zvakaita sema microparticles, mhepo inokuvadza, mabhakitiriya, nezvimwewo mumhepo mukati menzvimbo yakati rebei yemhepo, uye kudzora tembiricha yemukati, kuchena, kumanikidzwa kwemukati, kumhanya kwemhepo nekupararira kwayo, ruzha rwekudengenyeka, mwenje, magetsi asingachinji, nezvimwewo mukati menzvimbo yakati rebei inodiwa. Tinodaidza maitiro akadaro ezvakatipoteredza sechirongwa checleanroom. Chirongwa checleanroom chakazara chinosanganisira zvimwe zvinhu, zvinosanganisira zvikamu zvisere: sisitimu yekushongedza nekugadzirisa, sisitimu yeHVAC, sisitimu yekufema neyekubuda kwemhepo, sisitimu yekudzivirira moto, sisitimu yemagetsi, sisitimu yemapaipi ekushanda, sisitimu yekudzora otomatiki uye sisitimu yekupa mvura neyekudhonza mvura. Izvi zvikamu pamwe chete zvinoumba sisitimu yakazara yepurojekiti yecleanroom kuti ive nechokwadi chekuti inoshanda uye inoshanda.
1. Sisitimu yeClenroom
(1). Sisitimu yekushongedza nekugadzirisa chimiro
Chinobatanidza chekushongedza nekushongedza cheprojekti ye cleanroom chinowanzo sanganisira kushongedza kwakanangana kwehurongwa hwechivakwa chakavharirwa senge pasi, denga uye kupatsanura. Muchidimbu, zvikamu izvi zvinofukidza nzvimbo nhanhatu dzenzvimbo yakavharirwa ine mativi matatu, kureva pamusoro, madziro nevhu. Pamusoro pezvo, zvinosanganisirawo magonhi, mahwindo nezvimwe zvikamu zvekushongedza. Kusiyana nekushongedza imba nekushongedza kwemaindasitiri, cleanroom project inonyanya kutarisisa mitemo yekushongedza chaiyo uye ruzivo kuti ive nechokwadi chekuti nzvimbo yacho inosangana nemitemo yekuchena nehutsanana chaiyo.
(2). Sisitimu yeHVAC
Inofukidza chiller (mvura inopisa) unit (kusanganisira pombi yemvura, shongwe yekutonhodza, nezvimwewo) uye mwero wemuchina wepombi inotonhodzwa nemhepo nezvimwe zvishandiso, pombi yekutonhodza mhepo, bhokisi remhepo rinotonhodza rakabatanidzwa (kusanganisira chikamu chekuyerera kwakasanganiswa, chikamu chekutanga chemhedzisiro, chikamu chekudziya, chikamu chekufiriji, chikamu chekubvisa hunyoro, chikamu chekumanikidza, chikamu chepakati chemhedzisiro, chikamu chekumanikidzwa kwakasimba, nezvimwewo) zvinotariswawo.
(3). Kufefetera uye sisitimu yekubuda kwemhepo
Sisitimu yekufema imhando yakazara yemidziyo inosanganisira inopinza mweya, nzira yekubuditsa mweya, nzira yekupa mweya, feni, michina yekutonhodza nekudziyisa, firita, sisitimu yekudzora nezvimwe zvishandiso zvekuwedzera. Sisitimu yekubuditsa mweya isystem yese ine hood yekubuditsa mweya kana inopinza mweya, michina yekuchenesa imba uye feni.
(4). Sisitimu yekudzivirira moto
Nzira yekukurumidzira, mwenje yekukurumidzira, chinopfapfaidza, chinodzima moto, hose yekudzima moto, nzvimbo dzekuravira dzinozviitikira dzoga, chinovhara chinotenderera chisingatsvi moto, nezvimwewo.
(5). Sisitimu yemagetsi
Inosanganisira zvinhu zvitatu: mwenje, simba uye simba remagetsi risina simba, kunyanya rinofukidza marambi ekuchenesa, masoketi, makabati emagetsi, mitsetse, monitoring uye foni uye mamwe masisitimu emagetsi akasimba uye asina simba.
(6). Sisitimu yemapaipi ekugadzirisa
Muchirongwa chekuchenesa, chinonyanya kusanganisira: mapaipi egasi, mapaipi ezvinhu, mapaipi emvura akacheneswa, mapaipi emvura anopinza, steam, mapaipi emhepo yakachena, mapaipi emvura ekutanga, mapaipi emvura anotenderera, mapaipi ekuburitsa nekuburitsa mvura, condensate, mapaipi emvura anotonhodza, nezvimwewo.
(7). Sisitimu yekudzora otomatiki
Kusanganisira kudzora tembiricha, kudzora tembiricha, kudzora vhoriyamu yemhepo nekumanikidzwa, kutevedzana kwekuvhura uye kudzora nguva, nezvimwewo.
(8). Kupa mvura uye nzira yekudhonza mvura
Kurongeka kwehurongwa, kusarudzwa kwemapaipi, kuiswa kwemapaipi, zvinhu zvinoshandisa mvura uye chimiro chidiki chemvura, sisitimu yekutenderera kwenzvimbo yakachena, zviyero izvi, kurongeka uye kuiswa kwehurongwa hwemvura, nezvimwewo.
Indasitiri yezvekudya, nzvimbo yekuongorora mhando, indasitiri yezvemagetsi, chipatara, indasitiri yezvekurapa, nzvimbo dzemuchadenga, masangano ekutsvagisa sainzi, mafekitori emishonga, ma microelectronics, nzvimbo yekuchenesa zvipenyu nedzimwe nzvimbo dzinopa mhando dzakasiyana dzehutsanana hwemaworkshop akachena uye dhizaini, kuiswa nekuvaka, kuiswa, sevhisi yekutengeswa mushure mekutengesa nedzimwe mhinduro dzese. Laboratory yekuchengetedzwa kwezvinhu yakagadzirwa nekambani yedu inovimbisa hunhu hwekuvaka uye inosangana nezvinodiwa zvehurongwa hwehunyanzvi hwekuvaka hwakajairika.
2. Zvinodiwa pabasa rekuchenesa imba
(1). Mabasa ekuchenesa
① Gadzira nekugadzirisa dzimba dzekuchenesa dzine mhepo inotonhorera uye marabhoritari akachena, asina guruva uye asina tsvina ane mwero wakasiyana-siyana wekuchenesa, zvinodiwa pakugadzirisa uye mapurani epasi.
② Gadzirisai dzimba dzekuchenesa dzine zvinodiwa zvakakosha zvakaita sekumanikidzwa kusina kunaka, kupisa kwakanyanya, kudzivirira moto nekuputika, kudzivirira ruzha nekudzikamisa, kubvisa tsvina, kubvisa kunhuhwirira kwemuviri, uye kudzivirira kusimba kwemuviri.
③ Gadzira mwenje, nzvimbo dzemagetsi, magetsi, masisitimu ekudzora magetsi uye masisitimu ekudzora otomatiki anoenderana nekamuri rekushambidza.
3. Kushandiswa kwenzvimbo dzekuchenesa
(1). Makamuri ekuchenesa emuchipatara
Makamuri ekuchenesa emuchipatara anosanganisira makamuri ekuvhiyira akachena uye mawadhi akachena. Mawadhi akachena ezvipatara kazhinji inzvimbo dzinochengeterwa howa zvakanyanya kudzivirira varwere kubva mukubatwa nehutachiona kana kukonzera migumisiro yakaipa.
(2). Marabhoritari eP-level series
① Marabhoritari eP3 ndiwo marabhoritari ekuchengetedza hutachiona padanho rechitatu. Marabhoritari ekuchengetedza hutachiona akakamurwa kuita mazinga mana zvichienderana nehuwandu hwekukuvadzwa kwetupukanana nehupfu hwawo, nedanho rekutanga riri pasi uye danho rechina riri pamusoro. Akakamurwa kuita mapoka maviri: mazinga emasero nemazinga emhuka, uye mazinga emhuka akakamurwazve kuita mazinga emhuka diki nemazinga emhuka hombe. Marabhoritari ekutanga eP3 munyika yangu akavakwa muna 1987 uye ainyanya kushandiswa pakutsvagisa nezveAIDS.
②Labhoritari yeP4 inoreva laboratory yemazinga mana ekuchengetedza zvipenyu, iyo inoshandiswa zvakanyanya pakutsvagisa zvirwere zvinotapukira zvakanyanya. Ndiyo nzvimbo yepamusoro-soro yelabhoritari yekuchengetedza zvipenyu pasi rose. Hakuna labhoritari yakadaro muChina parizvino. Sekureva kwenyanzvi dzakakodzera, matanho ekuchengetedza emarabhoritari eP4 akaomesesa kupfuura emarabhoritari eP3. Vaongorori havafanirwe kungopfeka mbatya dzekudzivirira dzakavharirwa zvakakwana chete asiwo kutakura masirinda eokisijeni pavanopinda.
(3). Uinjiniya hwekuchenesa mafekitori nemaworkshop
Nzira dzekuvaka dzinogona kukamurwa kuva mainjiniya ehurumende uye mhando dzakagadzirwa kare.
Sisitimu yekuchenesa yakagadzirwa kare inoumbwa zvakanyanya nesisitimu yekupa mhepo inotonhodza, sisitimu yemhepo inodzoserwa, mhepo inobuda, utsi, chimiro chakavharirwa, mayuniti ekuchenesa vanhu nezvinhu, kupfapfaidza mhepo yekutanga, yepakati neyepamusoro, sisitimu yegesi nemvura, magetsi, kutarisa uye alarm yenzvimbo yekushanda, dziviriro yemoto, kutaurirana uye kurapwa kwepasi rinorwisa static.
①GMP clean workshop clean parameters:
Nguva dzekuchinja mhepo: kirasi 100000 ≥15 nguva; kirasi 10000 ≥20 nguva; kirasi 1000 ≥30 nguva.
Musiyano wekumanikidzwa: nzvimbo huru yekuchengetera zvinhu nekamuri riri pedyo ≥5Pa;
Avhareji yekumhanya kwemhepo: kirasi 100 nzvimbo yekuchengetera zvinhu yakachena 03-0.5m/s;
Tembiricha: >16℃ munguva yechando; <26℃ muzhizha; kuchinja-chinja ±2℃. Hunyoro 45-65%; hunyoro muGMP clean workshop zviri nani huve pa50%; hunyoro muelectronic workshop hwakakwira zvishoma kudzivirira magetsi asingachinji. Ruzha ≤65dB(A); mhepo itsva inowedzera 10%-30% yemhepo yese; kupenya: 300LX.
②Zvishandiso zvemumusangano weGMP:
Mapaneru emadziro nedenga emushandi wekuchenesa anowanzo gadzirwa nemaplate esimbi ane ruvara rwesandwich ane ukobvu hwe50mm, ayo akanaka uye akaomarara. Magonhi emakona ane arc, mafuremu emahwindo, nezvimwewo zvinowanzo gadzirwa nemaprofiles earuminiyamu anodized;
Pasi rinogona kugadzirwa nepasi rinozvienzanisa ne epoxy kana pasi repurasitiki rinodzivirira kupwanyika. Kana paine chinodiwa che anti-static, mhando ye anti-static inogona kusarudzwa;
Mapaipi emhepo neanodzosa mweya akagadzirwa nejira rakabatidzwa rinopisa, uye jira repurasitiki rePF rinodzivisa moto rine kuchenesa kwakanaka uye kuchengetedza kupisa rinonamirwa;
Bhokisi rehepa rinoshandisa furemu yesimbi isina ngura, yakanaka uye yakachena, uye plate ine maburi inoshandisa plate yearuminiyamu yakapendwa, inodzivirira ngura uye inodzivirira guruva uye iri nyore kuchenesa.
(4). Uinjiniya hwemagetsi nemuviri hwekuchenesa imba
Kazhinji inoshanda kumidziyo yemagetsi, makamuri emakombiyuta, mafekitori ema semiconductor, indasitiri yemotokari, indasitiri yendege, photolithography, kugadzira microcomputer nedzimwe indasitiri. Pamusoro pekucheneswa kwemhepo, zvakakoshawo kuve nechokwadi chekuti zvinodiwa zve anti-static zvinosangana nazvo.
Nguva yekutumira: Kukadzi-28-2025
