1. Kubviswa kweguruva mukamuri rakachena risina huruva
Basa guru rekamuri rakachena nderekudzora kuchena, tembiricha uye kunyorova kwemuchadenga izvo zvigadzirwa (senge silicon chips, nezvimwewo) zvinoratidzwa, kuitira kuti zvigadzirwa zvigone kugadzirwa uye kugadzirwa munzvimbo yakanaka yenzvimbo. Tinodaidza nzvimbo iyi sekamuri rakachena. Zvinoenderana nemaitiro epasirese, hutsanana hunonyanya kutariswa nehuwandu hwezvikamu pa cubic mita yemhepo ine dhayamita yakakura kupfuura yemhando yemhando. Mune mamwe mazwi, iyo inonzi guruva-isina haina 100% isina guruva, asi inodzorwa muchikamu chidiki kwazvo. Ehe, zvimedu zvinosangana neyakajairwa guruva muyero iyi zvatove zvidiki zvakanyanya kana zvichienzaniswa neguruva rakajairika ratinoona, asi kune zvimiro zvemaziso, kunyangwe guruva diki richava nechakaipa chakakura kwazvo, saka-isina guruva chinhu chisingadzivisiki chinodiwa mukugadzirwa kwe optical chimiro zvigadzirwa.
Kudzora huwandu hweguruva nehukuru hukuru kupfuura kana kuenzana ne0.5 microns pa cubic mita kusvika isingasviki 3520/cubic mita ichasvika kirasi A yepasi rose isina guruva mwero. Iyo isina guruva chiyero inoshandiswa mukugadzira chip-level uye kugadzirisa ine yakakwira zvinodiwa kuguruva kupfuura kirasi A, uye yakakwira mwero wakadaro unonyanya kushandiswa mukugadzira mamwe machipisi epamusoro. Huwandu hwehupfu hwehupfu hunodzorwa zvakanyanya pa35,200 pacubic mita, iyo inowanzozivikanwa sekirasi B mune yakachena kamuri indasitiri.
2. Mhando nhatu dzenzvimbo dzakachena dzekamuri
Imba yakachena isina chinhu: imba yakachena nzvimbo yakavakwa uye inogona kushandiswa. Iine ese akakodzera masevhisi uye mabasa. Nekudaro, hapana michina inoshandiswa nevashandisi munzvimbo iyi.
Static yakachena kamuri: nzvimbo yakachena yekamuri ine mabasa akazara, marongero akakodzera uye kuisirwa, iyo inogona kushandiswa zvinoenderana nezvirongwa kana iri kushandiswa, asi hapana vanoshanda munzvimbo iyi.
Dynamic yakachena kamuri: kamuri yakachena mune yakajairika kushandiswa, ine yakazara sevhisi mabasa, zvishandiso uye vashandi; kana zvichidikanwa, basa rakajairika rinogona kuitwa.
3. Kudzora zvinhu
(1). Inogona kubvisa guruva zvidimbu zvinoyangarara mumhepo.
(2). Inogona kudzivirira kugadzirwa kweguruva particles.
(3). Kudzora tembiricha uye mwando.
(4). Kudzora kudzora.
(5). Kubviswa kwemagasi anokuvadza.
(6). Air tightness yezvivakwa uye makamuri.
(7). Kudzivirirwa kwemagetsi akamira.
(8). Kudzivirirwa kwe electromagnetic interference.
(9). Kufunga nezvekuchengetedza zvinhu.
(10). Kufunga nezvekuchengetedza simba.
4. Kuronga
Mhando yekuyerera kwemhirizhonga
Mhepo inopinda mukamuri rakachena kubva mubhokisi rekufemesa nemhepo kuburikidza nemhepo duct uye sefa yemhepo (HEPA) mukamuri yakachena, uye inodzoserwa kubva kumadziro emadziro mapaneru kana pasi dzakasimudzwa kumativi ese ekamuri rakachena. Kuyerera kwemhepo hakufambi nenzira yakatsetseka asi kunopa nyonganiso isina kujairika kana mamiriro eddy. Rudzi urwu rwakakodzera kirasi 1,000-100,000 kamuri yakachena.
Tsanangudzo: Imba yakachena umo kuyerera kwemhepo kunoyerera nekumhanya kusina kuenzana uye haina kufanana, inoperekedzwa nekudzokera shure kana eddy current.
Nheyo: Dzimba dzakashama dzinovimba nemhepo inoyerera kuti irambe ichinyungudutsa mhepo yemukati uye zvishoma nezvishoma kunyorovesa mweya wakasviba kuti uwane hutsanana (dzimba dzine mhirizhonga dzakachena dzinowanzo gadzirwa pamazinga ehutsanana pamusoro pe1,000 kusvika 300,000).
Zvimiro: Dzimba dzakashambidzika dzakachena dzinotsamira pamhepo yakawanda kuti uwane hutsanana uye hutsanana mazinga. Huwandu hwekuchinja kwemhepo hunotaridza mwero wekucheneswa mune tsananguro (iyo yakanyanya shanduko yemhepo, iyo yakakwirira yehutsanana)
(1) Nguva yekuzvinatsa: inoreva nguva iyo imba yakachena inotanga kugovera mweya kukamuri yakachena zvinoenderana neyakagadzirirwa nhamba yekufefetera uye guruva remukati mukamuri rinosvika payakagadzirirwa utsanana level kirasi 1,000 inotarisirwa kunge isingapfuure maminetsi makumi maviri (15 maminetsi anogona kushandiswa kuverenga) kirasi 10,000 inotarisirwa kusapfuura maminetsi makumi matatu (20 maminitsi) 100,000 inotarisirwa kusapfuudza maminetsi makumi mana (30 maminetsi anogona kushandiswa kuverenga)
(2) Ventilation frequency (yakagadzirwa maererano nepamusoro-yekuzvichenesa nguva zvinodiwa) kirasi 1,000: 43.5-55.3 nguva / awa (yakajairwa: 50 nguva / awa) kirasi 10,000: 23.8-28.6 nguva / awa (yakajairika: 25 nguva / awa) kirasi 40-10 awa. (chiyero: 15 nguva / awa)
Zvakanakira: chimiro chakareruka, yakaderera sisitimu yekuvaka mutengo, nyore kuwedzera yakachena kamuri, mune dzimwe nzvimbo dzakakosha, bhenji risina guruva rakachena rinogona kushandiswa kuvandudza giredhi rekamuri rakachena.
Zvakaipa: guruva zvidimbu zvinokonzerwa nemhirizhonga zvinoyangarara munzvimbo yemukati uye zvakaoma kubudiswa, izvo zvinogona kusvibisa zviri nyore zvigadzirwa. Mukuwedzera, kana iyo system yakamiswa uye yobva yaitwa, inowanzotora nguva yakareba kuti iwane utsanana hunodiwa.
Laminar kuyerera
Laminar inoyerera mweya inofamba muyunifomu yakatwasuka mutsara. Mhepo inopinda mukamuri kuburikidza nesefa ine 100% yekuvhara mwero uye inodzoserwa nepauriri hwakasimudzwa kana mabhodhi ekuparadzanisa mativi ese. Rudzi urwu rwakakodzerwa kushandiswa munzvimbo dzakachena dzemakamuri ane magiredhi emakamuri akachena, kazhinji kirasi 1 ~ 100. Kune marudzi maviri:
(1) Horizontal laminar kuyerera: Mhepo yakachinjika inopeperetswa kunze kwesefa nenzira imwe chete uye inodzoserwa nemhepo inodzosa pane yakatarisana madziro. Guruva rinorasirwa kunze nemhepo. Kazhinji, kusvibiswa kwakanyanyisa kudivi rezasi kwerwizi.
Zvakanakira: Chimiro chakareruka, chinogona kugadzikana munguva pfupi mushure mekushanda.
Zvakaipa: Mutengo wekuvaka wakakwira kupfuura kuyerera kwemhirizhonga, uye nzvimbo yemukati haisi nyore kuwedzera.
(2) Vertical laminar kuyerera: Sirin'i yekamuri yakafukidzwa zvachose neULPA mafirita, uye mweya unopeperetswa kubva kumusoro uchienda pasi, unogona kuwana hutsanana hwepamusoro. Guruva rinogadzirwa panguva yekushanda kana nevashandi rinogona kukurumidza kubudiswa kunze pasina kukanganisa dzimwe nzvimbo dzebasa.
Zvakanakira: Zviri nyore kubata, yakagadzikana mamiriro anogona kuwanikwa mukati menguva pfupi mushure mekunge oparesheni yatanga, uye isiri nyore kukanganiswa nehurumende yekushanda kana vashandisi.
Zvakaipa: Mutengo wekuvaka wakakwira, wakaoma kushandisa nzvimbo, masirin'i anotora nzvimbo yakawanda, uye zvinonetsa kugadzirisa nekutsiva mafirita.
Composite type
Iro composite mhando ndeyekusanganisa kana kushandisa mhirizhonga yekuyerera mhando uye laminar kuyerera mhando pamwe chete, iyo inogona kupa yemuno yekupedzisira-yakachena mweya.
(1) Yakachena Tunnel: Shandisa HEPA kana ULPA mafirita kuvhara 100% yenzvimbo yekugadzirisa kana nzvimbo yebasa kuti uwedzere hutsanana kusvika pamusoro peKirasi 10, iyo inogona kuchengetedza mari yekuisa nekushanda.
Rudzi urwu runoda kuti nzvimbo yebasa yemushandisi isiyane kubva pachigadzirwa uye kugadzirisa kwemuchina kudzivirira kukanganisa basa nemhando panguva yekugadzirisa muchina.
Tunnels dzakachena dzine zvimwe zviviri zvakanakira: A. Nyore kuwedzera flexibly; B. Zvigadzirwa zvekugadzirisa zvinogona kuitwa nyore nyore munzvimbo yekuchengetedza.
(2) Tube Yakachena: Kukomberedza uye kunatsa mutsara wekugadzira otomatiki iyo iyo inoyerera yezvigadzirwa inopfuura, uye kuwedzera hutsanana kusvika pamusoro pekirasi 100. Nemhaka yokuti chigadzirwa, mufambisi uye nzvimbo inogadzira guruva yakaparadzana kubva kune imwe neimwe, mhepo shoma shoma inogona kuwana hutsanana hwakanaka, iyo inogona kuchengetedza simba uye inonyanya kukodzera kumagetsi ekugadzira mitsara isingatsvaki basa remaoko. Inoshanda kune emishonga, chikafu uye semiconductor maindasitiri.
(3) Yakachena Spot: Hutsanana hwenzvimbo yekugadzirwa kwechigadzirwa muimba ine mhirizhonga yakachena ine nzvimbo yakachena yekamuri ye10,000 ~ 100,000 inowedzerwa kusvika ku10 ~ 1000 kana pamusoro pezvinangwa zvekugadzira; mabhenji ebasa akachena, mashedhi akachena, makamuri akagadzirwa akachena, uye mawodhiropu akachena ndezvechikamu ichi.
Bhenji rakachena: kirasi 1 ~ 100.
Dumba rakachena: Kanzvimbo kadiki kakakomberedzwa nemachira epurasitiki anodzivirira ari munzvimbo ine mhirizhonga yakachena yekamuri, achishandisa yakazvimiririra HEPA kana ULPA uye mayuniti ekufemesa mhepo kuti ive nzvimbo yakakwirira-yepamusoro yakachena, ine mwero we10 ~ 1000, kureba ingangoita 2.5 metres, uye nzvimbo yekuvhara inosvika 10m2 kana pasi. Iine mbiru ina uye ine mavhiri anofambiswa kuitira kushandiswa nyore nyore.
5. Kuyerera Kwemhepo
Kukosha kweAirflow
Kuchena kwekamuri yakachena kunowanzobatwa nemhepo. Mune mamwe mazwi, kufamba uye kupararira kweguruva rinogadzirwa nevanhu, makamuri emuchina, zvivakwa zvekuvaka, nezvimwe zvinodzorwa nekuyerera kwemhepo.
Imba yakachena inoshandisa HEPA neULPA kusefa mhepo, uye guruva rayo rekuunganidza chiyero chakakwira kusvika 99.97 ~ 99.99995%, saka mhepo inosefa nesefa iyi inogona kunzi yakachena kwazvo. Nekudaro, mukuwedzera kune vanhu, kune zvakare guruva sosi semichina mukamuri rakachena. Kana mavhu akagadzirwa akapararira, hazvigoneke kuchengetedza nzvimbo yakachena, saka kuyerera kwemhepo kunofanirwa kushandiswa kukurumidza kuburitsa guruva rakagadzirwa kunze.
Kufurira Zvinhu
Pane zvinhu zvakawanda zvinokanganisa mafambiro emhepo yekamuri yakachena, senge michina yekugadzira, vashandi, yakachena kamuri yekusangana zvinhu, zvigadziriso zvemwenje, nezvimwe. Panguva imwecheteyo, nzvimbo yekutsaudzira yekufambisa kwemhepo pamusoro pezvigadzirwa zvekugadzira inofanirawo kutariswa.
Iyo yekuyerera kwemhepo nzvimbo iri pamusoro petafura yekushanda yakajairwa kana michina yekugadzira inofanirwa kuiswa pa2/3 yechinhambwe pakati penzvimbo yakachena yekamuri uye bhodhi rekuparadzanisa. Nenzira iyi, kana mushandisi ari kushanda, mhepo inoyerera inogona kuyerera kubva mukati menzvimbo yekushanda kusvika kunzvimbo yekushanda uye kubvisa guruva; kana iyo diversion point yakagadziriswa pamberi penzvimbo yemaitiro, inova isina kufanira kuyerera kwemhepo. Panguva ino, yakawanda yemhepo inoyerera ichienda kumashure kwenzvimbo yekushanda, uye guruva rinokonzerwa nekushanda kwemuitisi richatakurwa kumusana wezvigadzirwa, uye bhenji rekushanda richasvibiswa, uye chibereko chichaderera zvisingadzivisiki.
Zvipingamupinyi zvakadai sematafura ebasa mumakamuri akachena zvichave nemhepo dzeeddhi panosangana, uye kuchena pedyo navo kunenge kusina kunaka. Kuchera gomba remhepo rekudzoka patafura yebasa kunoderedza eddy current phenomenon; kana kusarudzwa kwezvinhu zvegungano kwakakodzera uye kana iyo dhizaini marongerwo akakwana zvakare zvinhu zvakakosha zvekuti kufambisa kwemhepo kunova eddy ikozvino chiitiko.
6. Kuumbwa kwekamuri yakachena
Iko kuumbwa kwekamuri rakachena kunoumbwa neanotevera masisitimu (hapana ayo akakosha mumamolekemu ehurongwa), zvikasadaro hazvizogone kuumba yakakwana uye yemhando yepamusoro kamuri yakachena:
(1) Ceiling system: inosanganisira sirin'i tsvimbo, I-beam kana U-beam, sirin'i grid kana sirin'i furemu.
(2) Air conditioning system: inosanganisira air cabin, filter system, windmill, nezvimwe.
(3) Rusvingo rwakaparadzana: kusanganisira mahwindo nemagonhi.
(4) Floor: kusanganisira yakakwira pasi kana anti-static pasi.
(5) Zvigadziriso zvemwenje: LED yekuchenesa mwenje mwenje.
Chimiro chikuru chekamuri rakachena chinowanzo gadzirwa nesimbi simbi kana bhonzo simende, asi zvisinei kuti imhando yechimiro, inofanirwa kusangana nemamiriro anotevera:
A. Hapana kutsemuka kuchaitika nekuda kwekushanduka kwetembiricha uye kudengenyeka;
B. Hazvisi nyore kugadzira guruva, uye zvakaoma kuti zvidimbu zvibatanidze;
C. Low hygroscopicity;
D. Kuti uchengetedze mamiriro ehunyoro muimba yakachena, kupisa kwekushisa kunofanira kunge kwakakwirira;
7. Kuronga nekushandisa
Imba yakachena yeindasitiri
Kudzora zvidimbu zvisina hupenyu ndicho chinhu. Iyo inonyanya kudzora kusvibiswa kweguruva remhepo zvimedu kune chinhu chinoshanda, uye mukati kazhinji inochengetedza yakanaka yekumanikidza mamiriro. Inokodzera indasitiri yemashini chaiyo, indasitiri yemagetsi (semiconductors, maseketi akabatanidzwa, nezvimwewo), indasitiri yezvemhepo, indasitiri yemakemikari, atomic simba indasitiri, optical uye magineti chigadzirwa indasitiri (CD, firimu, tepi kugadzira) LCD (liquid crystal glass), komputa hard disk, komputa musoro kugadzira uye mamwe maindasitiri.
Biological clean room
Inonyanya kudzora kusvibiswa kwezvikamu zvipenyu (mabhakitiriya) uye zvidimbu zvisina upenyu (guruva) kune chinhu chinoshanda. Inogona kukamurwa kuita;
A. General biological clean room: kunyanya inodzora kusvibiswa kwemicrobial (bacteria) zvinhu. Panguva imwecheteyo, zvinhu zvayo zvemukati zvinofanirwa kutsungirira kukukurwa kweakasiyana sterilizing agents, uye mukati kazhinji unovimbisa kudzvanywa kwakanaka. Chaizvoizvo, izvo zvemukati zvemukati zvinofanirwa kukwanisa kumira zvakasiyana siyana kurapwa kweindasitiri yakachena kamuri. Mienzaniso: indasitiri yemishonga, zvipatara (makamuri ekuvhiyira, mawadhi asingabereki), chikafu, zvizorwa, kugadzirwa kwechinwiwa, marabhoritari emhuka, marabhoritari ekuongorora muviri nemakemikari, zviteshi zveropa, nezvimwe.
B. Biological safety clean room: inonyanya kudzora kusvibiswa kwezvikamu zvipenyu zvechinhu chinoshanda kunyika yekunze nevanhu. Kumanikidzwa kwemukati kunofanira kuchengetedzwa kusina kunaka nemhepo. Mienzaniso: bacteriology, biology, marabhoritari akachena, engineering yemuviri (recombinant genes, kugadzirira vaccine)
Nguva yekutumira: Feb-07-2025